Esashi, Masayoshi: search on Z-Library

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1

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques

Liu, Yueming, Ma, Zhichun, Jin, Guofan, Esashi, Masayoshi, Tian, Weijian, Chen, Xuyuan

Year:

2004

Language:

english

File:

PDF, 160 KB

english, 2004

2

Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue, Tomoya Komatsu, Nobuyuki Nakamura, Ken-ya Hashimoto, Hideki Hirano, Masayoshi Esashi, Shuji Tanaka

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.03 MB

english, 2012

3

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing

Nishino, Hitoshi, Yoshida, Shinya, Kojima, Akira, Ikegami, Naokatsu, Koshida, Nobuyoshi, Tanaka, Shuji, Esashi, Masayoshi

Year:

2014

Language:

english

File:

PDF, 1.26 MB

english, 2014

4

One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE

Takashi Abe, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 496 KB

english, 2000

5

Micropump and sample-injector for integrated chemical analyzing systems

Shuichi Shoji, Shigeru Nakagawa, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 839 KB

english, 1990

6

Stacked Integration of MEMS on LSI

Esashi, Masayoshi, Tanaka, Shuji

Journal:

Year:

2016

Language:

english

File:

PDF, 15.27 MB

english, 2016

7

Biomedical pressure sensor using buried piezoresistors

Masayoshi Esashi, Hiroshi Komatsu, Tadayuki Matsuo

Journal:

Sensors and Actuators

Year:

1983

Language:

english

File:

PDF, 416 KB

english, 1983

8

Prototype miniature blood gas analyser fabricated on a silicon wafer

Shuichi Shoji, Masayoshi Esashi, Tadayuki Matsuo

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 707 KB

english, 1988

9

Surface micromachined thermally driven micropump

Won Ick Jang, Chang Auck Choi, Chi Hoon Jun, Youn Tae Kim, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 572 KB

english, 2004

10

Fabrication of three-dimensional microstructure using maskless gray-scale lithography

Kentaro Totsu, Kenta Fujishiro, Shuji Tanaka, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 518 KB

english, 2006

11

Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida, Shuji Tanaka, Yosuke Hagihara, Shigeaki Tomonari, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2010

Language:

english

File:

PDF, 1.59 MB

english, 2010

12

Deep reactive ion etching of Pyrex glass using SF6 plasma

Xinghua Li, Takashi Abe, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 965 KB

english, 2001

13

Stainless steel-based integrated mass-flow controller for reactive and corrosive gases

Kaoru Hirata, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 457 KB

english, 2002

14

Encapsulated micro mechanical sensors

Masayoshi Esashi

Journal:

Microsystem Technologies

Year:

1994

Language:

english

File:

PDF, 924 KB

english, 1994

15

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Journal:

Sensors and Actuators

Year:

1989

Language:

english

File:

PDF, 520 KB

english, 1989

16

A study of a high-pressure micropump for integrated chemical analysing systems

Shuichi Shoji, Masayoshi Esashi, Bart van der Schoot, Nico de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 443 KB

english, 1992

17

A Fail-safe Logic Operator Using an Insulated Planar Transformer

Norihiro Asada, Hidetoshi Matsuki, Masayoshi Esashi

Journal:

Electrical Engineering in Japan

Year:

1995

Language:

english

File:

PDF, 564 KB

english, 1995

18

Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy

Shao, Chuan-Yu, Kawai, Yusuke, Esashi, Masayoshi, Ono, Takahito

Journal:

Review of Scientific Instruments

Year:

2010

Language:

english

File:

PDF, 2.06 MB

english, 2010

19

Mechanically coupled synchronized resonators for resonant sensing applications

Feng, Jinyang, Ye, Xiongying, Esashi, Masayoshi, Ono, Takahito

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 884 KB

english, 2010

20

SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Research on micro/nano film getters for vacuum maintenance of MEMS

Jin, Yufeng, Zhao, Ying, Esashi, Masayoshi, Zhou, Zhaoying

Year:

2006

Language:

english

File:

PDF, 306 KB

english, 2006

21

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Structures and MEMS for Optical Processing IV - Extremely high aspect ratio metal structures for suspension of a micro-optical shutter

Hui, Allan P., Toda, Risaku, Esashi, Masayoshi, Motamedi, M. Edward, Herzig, Hans Peter

Year:

1998

Language:

english

File:

PDF, 2.65 MB

english, 1998

22

Micro/nano electro mechanical systems for practical applications

Esashi, Masayoshi

Journal:

Journal of Physics Conference Series

Year:

2009

Language:

english

File:

PDF, 2.03 MB

english, 2009

23

Revolution of Sensors in Micro-Electromechanical Systems

Esashi, Masayoshi

Journal:

Japanese Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 2.08 MB

english, 2012

24

Development of Minimally Invasive Medical Devices Using Micro/nano Machining Technology

HAGA, Yoichi, MATSUNAGA, Tadao, ESASHI, Masayoshi

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2008

File:

PDF, 655 KB

2008

25

Comprehensive Die Shear Test of Silicon Packages Bonded by Thermocompression of Al Layers with Thin Sn Capping or Insertions

Satoh, Shiro, Fukushi, Hideyuki, Esashi, Masayoshi, Tanaka, Shuji

Journal:

Year:

2018

Language:

english

File:

PDF, 48.41 MB

english, 2018

26

Design of High Power Electrostatic Motor and Generator Using Electrets

Genda, Takashi, Tanaka, Shuji, Esashi, Masayoshi

Journal:

IEEJ Transactions on Sensors and Micromachines

Year:

2003

File:

PDF, 382 KB

2003

27

Fabrication of an integrated microprobing head for fault analysis of mos integrated circuits

Shuichi Shoji, Masayoshi Esashi, Tadayuki Matsuo

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 981 KB

english, 1988

28

An integrated miniature capacitive pressure sensor

Takeshi Kudoh, Shuichi Shoji, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 1.43 MB

english, 1991

29

Three-axis magneto-impedance effect sensor system for detecting position and orientation of catheter tip

Kentaro Totsu, Yoichi Haga, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 272 KB

english, 2004

30

Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist

Li Li, Takashi Abe, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 226 KB

english, 2004

31

Characteristics on PZT (Pb(ZrxTi1−x)O3) films for piezoelectric angular rate sensor

Sung-Ho Lee, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 234 KB

english, 2004

32

Surface micromachined AlN thin film 2 GHz resonator for CMOS integration

Motoaki Hara, Jan Kuypers, Takashi Abe, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 311 KB

english, 2005

33

Dynamic Braille display using SMA coil actuator and magnetic latch

Yoichi Haga, Wataru Makishi, Kentaro Iwami, Kentaro Totsu, Kazuhiro Nakamura, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 415 KB

english, 2005

34

Micro-ejector to supply fuel–air mixture to a micro-combustor

Daisuke Satoh, Shuji Tanaka, Kazushi Yoshida, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 364 KB

english, 2005

35

Piezoactuator-integrated monolithic microstage with six degrees of freedom

De-Yuan Zhang, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 336 KB

english, 2005

36

Parasitic leakage resonance-free HRS MEMS package for microwave and millimeter-wave

Yo-Tak Song, Hai-Young Lee, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 877 KB

english, 2006

37

Test of B/Ti multilayer reactive igniters for a micro solid rocket array thruster

Shuji Tanaka, Kazuyuki Kondo, Hiroto Habu, Akihito Itoh, Masashi Watanabe, Keiichi Hori, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 2.28 MB

english, 2008

38

Near-field recording with high optical throughput aperture array

Phan Ngoc Minh, Takahito Ono, Shuji Tanaka, Kenya Goto, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 527 KB

english, 2002

39

Mechanical polarization modulator using micro-turbo machinery for Fourier transform infrared spectroscopy

Shuji Tanaka, Motoaki Hara, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 623 KB

english, 2002

40

An active guide wire with shape memory alloy bending actuator fabricated by room temperature process

Takashi Mineta, Toshiaki Mitsui, Yoshiyuki Watanabe, Seiya Kobayashi, Youichi Haga, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 457 KB

english, 2002

41

Acceleration switch with extended holding time using squeeze film effect for side airbag systems

Tadao Matsunaga, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 723 KB

english, 2002

42

Batch fabrication of intravascular forward-looking ultrasonic probe

Yoichi Haga, Masahiro Fujita, Kazuhiro Nakamura, Chang Jung Kim, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 406 KB

english, 2003

43

Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections

Takashi Abe, Xinghua Li, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 416 KB

english, 2003

44

High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 105 KB

english, 2003

45

Microfabrication of thermoelectric materials by silicon molding process

Jing-Feng Li, Shuji Tanaka, Toshiya Umeki, Shinya Sugimoto, Masayoshi Esashi, Ryuzo Watanabe

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 574 KB

english, 2003

46

A piezodriven XY-microstage for multiprobe nanorecording

Deyuan Zhang, Chienliu Chang, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 310 KB

english, 2003

47

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 287 KB

english, 1996

48

Thin-beam bulk micromachining based on RIE and xenon difluoride silicon etching

Risaku Toda, Kazuyuki Minami, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 606 KB

english, 1998

49

Microfabrication of miniature aperture at the apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy

Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 860 KB

english, 2000

50

Mechanical behavior of ultrathin microcantilever

Jinling Yang, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 266 KB

english, 2000